If you find in your apache error logs some lines with:

No space left on device. Couldn't create accept lock

and a normal service restart does not help it has likely something to do with Semaphores running out.

Try a service shutdown and check your apache semaphores afterwards with:
# ipcs | grep apache

Should there still be a lot of them you can delete them with following command:
# ipcs -s | grep apache | perl -e 'while (<STDIN>) { @a=split(/\s+/); print `ipcrm sem $a[1]`}'

Now start your apache normally and verify the logs if the problem has gone.